Field emission scanning electron microscope
Field emission scanning electron microscope FEG-SEM Tescan Mira3 GMU is a basic instrument of the laboratory. Besides its usual and enhanced functions it ensures also a proper function of additional microanalytical systems EDX and EBSD (Oxford Instruments). The microscope itself enables to study samples in secondary and backscattered electrons and cathodoluminiscence, as well as SEI in low-vac mode (7-500 Pa). It is used for characterization of sample surfaces and their chemical composition. In the connection with microanalytical systems it also serves for detail microchemical studies.